About: http://webisa.webdatacommons.org/388395157

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Besides IBE and RIBE, other etching techniques, such as sputtering and laser ablation, can also be used to surface thickness adjustment through the aperture 52 of the mask 50.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com