| http://www.w3.org/ns/prov#value | - Method according to claims 1, 5, 6, or 14, wherein the insulating layer is a material selected from the group consisting of aluminum oxide (Al2 O3), silicon dioxide (SiO2), phosphorous glass (SiO2.P2 O5), boron glass (SiO2.B2 O3)and silicon nitride (Si3 N4).
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