About: http://webisa.webdatacommons.org/388764237

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Further, since the semiconductor film such as Si or the like has normally a low film-forming rate, its productivity is not superior and it shows a certain problem in its production.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com