About: http://webisa.webdatacommons.org/388764769

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Subsequently, over the third oxide film, an amorphous semiconductor film containing a semiconductor such as silicon or silicon germanium and a rare gas element such as Ar is formed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au