About: http://webisa.webdatacommons.org/388778396

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Further, there is a method to suppress the voltage change between the ends of the electrostatic attracting film by shortening the period of the pulse bias voltage to 0.1 .mu.s to 10
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com