About: http://webisa.webdatacommons.org/389345109

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Because a DMD includes circuit components as well as a microminiature deflectable beam, it is especially sensitive to debris resulting from sawing the wafer and to the fluids and other substances used to facilitate sawing.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es