About: http://webisa.webdatacommons.org/389478802

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Reverse physical sputtering or sputter etching is a process by which atoms or molecules from the surface of a material are dislocated or removed by the impact energy of gas ions, which are accelerated in an electric field.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com