About: http://webisa.webdatacommons.org/389516270

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Next, the ground surface of the substrate 50 over which the plurality of TFTs 54 is not formed is polished using a polishing apparatus (e.g., a polishing pad or a polishing abrasive grain such as cerium oxide or the like).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au