About: http://webisa.webdatacommons.org/39001153

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present novel method of cleaning has been demonstrated on various films and particles such as silicon dioxide, aluminum nitride, silicon nitride and various polymers that are normally formed inside a process chamber.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au