| http://www.w3.org/ns/prov#value | - As a result of the heat treatment, the catalyst element is gettered in the regions where phosphorus is added, whereby the concentration of the catalyst element in the regions to become active layers is reducedto 5.times.10.sup.17 atoms/cm.sup.3 or less.After the completion of the gettering step, active layers are formed by using the regions other than the regions where phosphorus is added.
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