About: http://webisa.webdatacommons.org/390158673

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As will be understood from the following discussion, the value of the method of this invention is most apparent when the first layer is very thin and is made of a material which may be susceptible to the first etching process.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com