About: http://webisa.webdatacommons.org/390223196

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	If the wafer surface is not sufficiently planar, some regions will be in focus and clearly defined, and other regions will not be defined well enough, resulting in a nonfunctional or less than optical circuit.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com