About: http://webisa.webdatacommons.org/39033399

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Therefore, one of the important problems encountered in the preparation of the highly integrated LSI is that each metal conductor of the wiring layer be capable of extending across such a large step without being broken.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com