About: http://webisa.webdatacommons.org/390401904

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A refractory metal, for example Ti, is then sputtered over the base island region, to a thickness of approximately 400 to 1000 angstroms.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com