About: http://webisa.webdatacommons.org/390601003

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Resistor 16 then is deposited, following which a layer 17 of TiW or other suitable material such as tantalum or silicon is deposited at a film thickness on the order of 2-4 micrometers, as shown in FIG. 14.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es