About: http://webisa.webdatacommons.org/390855418

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Deposition can be onto a substrate, such as Si, Ge, GaAs, GaN, Al2O3, SiC or AlN, with or without an inert metal electrode.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com