About: http://webisa.webdatacommons.org/391017057

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Next, as shown in FIG. 10(d), as in the fourth embodiment, the whole surface including the portion half-etched in the preceding step is coated with the second resist 112 of positive liquid type and exposed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com