About: http://webisa.webdatacommons.org/391023819

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Here, as a form of the aspect, in the aforementioned step of depositing the silicon film on the dielectric film, a polycrystalline silicon film or an amorphous silicon film is deposited as the silicon film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com