About: http://webisa.webdatacommons.org/39108171

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Substrate 52 can comprise a single crystal semiconductor material, such as, for example, monocrystalline silicon, and in particular aspects can consist essentially of, or consist of doped or undoped silicon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com