About: http://webisa.webdatacommons.org/391133066

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	r, a silicon nitride layer, a BPSG layer and other insulating layers, is low, i.e. the selectivity ratio is high, and a polishing method employing such a composition.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com