About: http://webisa.webdatacommons.org/391438530

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A further aspect of the present invention is a method of cleaning a microelectronic device, to remove soluble material, particulate matter, and/or contaminants, etc.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es