About: http://webisa.webdatacommons.org/39144210

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Furthermore, the silicon nitride film 11 is coated with a titanium nitride film 13 having a thickness of for example 500 nm.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com