| http://www.w3.org/ns/prov#value | - As an etchant used in this step, one of the following aqueous solutions is used: an aqueous solution containing monohydrogen potassium peroxomonosulfate and hydrogen fluoride, an aqueous solution containing a peroxosulfate salt, hydrogen fluoride, and hydrogen chloride or a chloride compound, and an aqueous solution containing a peroxosulfate salt and a fluoride.
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