About: http://webisa.webdatacommons.org/391522674

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A substrate such as Si, sapphire, GaN, and AlN may be used in place of the semi-insulating SiC substrate in FIG. 19.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com