About: http://webisa.webdatacommons.org/391522710

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A silicon oxide film is then deposited thereon to a thickness, such as 20 to 150 nm, by using CVD or PVD techniques.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com