About: http://webisa.webdatacommons.org/391590649

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As neutralizer agent, fluoride such as HF, CHF3, CH2 F2, CF4, GeF4, Si2 F6 or so on, and chloride such as HCl, CHCl3, CH2 Cl2, CCl2 F2, or so on can be employed with irradiation of ultraviolet light.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es