| http://www.w3.org/ns/prov#value | - As the surfactants used if necessary in the resist composition of the present invention, there can be exemplified by nonionic surfactants, e.g. polyethylene glycol distearate, polyethylene glycol dilaurate, poly(ethylene glycol), poly(propylene glycol), polyoxyethylene stearyl ether, polyoxyethylene cetyl ether, etc., cationic surfactants and anionic surfactants.
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