About: http://webisa.webdatacommons.org/391600893

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As an example, a wet etch such as ammonium hydroxide, tetramethylammonium hydroxide (TMAH), or the like may be used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de