About: http://webisa.webdatacommons.org/391998265

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	M???rz 2002Samsung Electronics Co., Ltd.Method of forming semiconductor device pattern including cross-linking and flow baking a positive photoresistUS6364465 *25.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de