About: http://webisa.webdatacommons.org/392331938

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Before deposition of the dielectric layer, however, the substrate is typically subjected to multiple processing steps to form active devices and other structures as understood by a person of ordinary skill in the art.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com