About: http://webisa.webdatacommons.org/39255013

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Outlet valve 24 could be closed while inlet valve 22 is opened, and vaporized precursor caused to flow therethrough wherein the reservoir volume is increased to some quantity, for example as shown in FIG. 1.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au