About: http://webisa.webdatacommons.org/392771380

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	l Systems (MEMS) made of silicon are playing an increasingly important role in areas such as health care, for example as patient monitoring systems, and energy, e.g. in the form of micro fuel cell systems based on MEMS technology.
http://www.w3.org/ns/prov#wasQuotedFrom	mrs.org