About: http://webisa.webdatacommons.org/392787339

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	C. A drawback is that high temperature treatments can degrade other structures such as aluminum or other metal wiring layer that have a low thermal tolerance.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com