| http://www.w3.org/ns/prov#value | - Typically, the blanket undoped silicate glass layer 14 is formed to a thickness of from about 80 to about 150 angstroms while employing a chemical vapor deposition (CVD) method, such as a [plasma enhanced chemical vapor deposition (PECVD) method employing silane or tetraethylorthosilicate (TEOS) as a silicon source material, along with an appropriate oxidant.
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