About: http://webisa.webdatacommons.org/3930218

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A method for measuring one or more parameters of a sample, said sample including a plurality of periodic diffracting structures, comprising:
http://www.w3.org/ns/prov#wasQuotedFrom	google.com