About: http://webisa.webdatacommons.org/393100202

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Fe is not included, because a sputtering target including Fe has a relatively low strength and may be broken during film deposition.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com