About: http://webisa.webdatacommons.org/393301385

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Here, the chamber is in a condition to begin a processing operation, such as a deposition or etch operation and is in a clean state.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com