| http://www.w3.org/ns/prov#value | - 20100277706Method of Measurement, an Inspection Apparatus and a Lithographic Apparatus - According to an example, a first layer of a substrate comprises a plurality of gratings having a periodicity P. A second layer of the substrate comprises a plurality of gratings, overlapping with the first set of gratings, and having a periodicity of NP, where N is an integer greater than 2.
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