About: http://webisa.webdatacommons.org/393435069

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Next, source and drain regions are formed within active semiconductor layer 107 using conventional methods such as ion implantation.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com