PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • Even though the etch rates are well-known, variables such as temperature, bath life, oxide thickness, and metal thickness contribute to process variation and yield loss.
http://www.w3.org/ns/prov#wasQuotedFrom
  • electroiq.com