About: http://webisa.webdatacommons.org/393767013

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As shown in FIGS. 3 and 4, in a semiconductor device manufacturing apparatus 101, cassettes 110 are used as wafer carriers to accommodate wafers 200 made of a material such as silicon.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com