About: http://webisa.webdatacommons.org/393771056

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A solution of the composition is applied to a substrate such as a silicon wafer coated with a silicon
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com