About: http://webisa.webdatacommons.org/393843068

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As a process for preparing an inorganic insulating film to which the present invention can be applied, a low pressure CVD process, a plasma CVD process and other processes can be used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es