About: http://webisa.webdatacommons.org/393930543

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Process chambers 112, where manufacturing processes such as etching are performed, open to the transfer chamber 108 along its periphery.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com