About: http://webisa.webdatacommons.org/394016868

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Preferably, the temperature of the flow passages is raised to 100??? C. or over, depending on a variety of conditions such as the type, the volume and the pressure of gas used in the semiconductor manufacturing process.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com