About: http://webisa.webdatacommons.org/394124407

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	M=(n???LP???LT)/(n+1) where n is an integer of not less than one, LP is a length of an illumination area on the mask in the second direction, and LT is a width of a pattern area, formed on the mask, in the second direction.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com