About: http://webisa.webdatacommons.org/394183791

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An insulating film including silicon as its main constituent, which becomes a gate insulating film 108, is then formed next after cleaning the surface of the semiconductor film using an etchant containing hydrofluoric acid.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com