About: http://webisa.webdatacommons.org/394258623

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In order not to be etched the TFT layer 103, an insulating film including oxygen or nitrogen is preferably used as the base insulating film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com