About: http://webisa.webdatacommons.org/394287557

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this manner, it becomes possible to compensate for defects, such as pin holes, that are liable to be formed in the thin nitride film 25b.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com