| http://www.w3.org/ns/prov#value | - 20110297843ION IMPLANTING APPARATUS AND DEFLECTING ELECTRODE - An ion implanting apparatus includes: an electrostatic accelerating tube for causing an ion beam extracted from an ion source to have a desirable energy, and deflecting the ion beam to be incident on a target, the electrostatic accelerating tube including deflecting electrodes provided to interpose the ion beam therebetween.
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